EPJ

Three-dimensional laser writing inside silicon using THz-repetition-rate trains of ultrashort pulses

Andong Wang, Amlan Das and David Grojo

EPJ Web Conf., 238 (2020) 12014

Published online: 20 August 2020

DOI: 10.1051/epjconf/202023812014

Andong Wang

Amlan Das

David Grojo

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