EPJ

Planarization of Lithium Niobate Surface Using a Thin Film Catalyst in Pure Water

Pho Van Bui, Daisetsu Toh, Masahiko Kanaoka, Hiromi Okada, Satoshi Matsuyama, Kazuto Yamauchi and Yasuhisa Sano

EPJ Web Conf., 266 (2022) 03006

Published online: 13 October 2022

DOI: 10.1051/epjconf/202226603006

Pho Van Bui

Daisetsu Toh

Masahiko Kanaoka

Hiromi Okada

Satoshi Matsuyama

Kazuto Yamauchi

Yasuhisa Sano

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