EPJ

Hybrid optical measurement technique for detection of defects in epitaxially grown 4H-SiC layers

Elena Ermilova, Matthias Weise and Andreas Hertwig

EPJ Web Conf., 266 (2022) 10001

Published online: 13 October 2022

DOI: 10.1051/epjconf/202226610001

Elena Ermilova

Matthias Weise

Andreas Hertwig

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