EPJ

Characterisation of nanowire structures with scatterometric and ellipsometric measurements

Jana Grundmann, Tim Käseberg and Bernd Bodermann

EPJ Web Conf., 266 (2022) 10003

Published online: 13 October 2022

DOI: 10.1051/epjconf/202226610003

Jana Grundmann

Tim Käseberg

Bernd Bodermann

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