EPJ

Comparison of Bi₂O₃-targets produced by thermal evaporation and RF magnetron sputtering

Birgit Kindler, Bettina Lommel, Elif Celik Ayik, Annett Huebner, Jutta Steiner and Vera Yakusheva

EPJ Web Conf., 285 (2023) 10001

Published online: 22 June 2023

DOI: 10.1051/epjconf/202328510001

Birgit Kindler

Bettina Lommel

Elif Celik Ayik

Annett Huebner

Jutta Steiner

Vera Yakusheva

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