EPJ

Simultaneous atmospheric pressure plasma jet etching and laser irradiation for ultra-precise optical glass processing

Robert Heinke, Thomas Arnold, Martin Ehrhardt, Pierre Lorenz and Klaus Zimmer

EPJ Web Conf., 309 (2024) 03022

Published online: 31 October 2024

DOI: 10.1051/epjconf/202430903022

Robert Heinke

Thomas Arnold

Martin Ehrhardt

Pierre Lorenz

Klaus Zimmer

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