Rapid thermal annealing of sputter-deposited ZnO:Al films for microcrystalline Si thin-film solar cells H. Koshino, Z. Tang, S. Sato, H. Shimizu, Y. Fujii, T. Hanajiri and H. Shirai EPJ Photovolt., 3 (2012) 35001 Published online: 26 June 2012 DOI: 10.1051/epjpv/2012002