Epitaxial growth of silicon and germanium on (100)-oriented crystalline substrates by RF PECVD at 175 °C M. Labrune, X. Bril, G. Patriarche, L. Largeau, O. Mauguin and P. Roca i Cabarrocas EPJ Photovolt., 3 (2012) 30303 Published online: 13 November 2012 DOI: 10.1051/epjpv/2012010