Microcrystalline silicon absorber layers prepared at high deposition rates for thin-film tandem solar cells S. Michard, V. Balmes, M. Meier, A. Lambertz, T. Merdzhanova and F. Finger EPJ Photovolt., 4 (2013) 45201 Published online: 06 December 2013 DOI: 10.1051/epjpv/2013026