EPJ

Impact of deposition parameters on the material quality of SPC poly-Si thin films using high-rate PECVD of a-Si:H

Avishek Kumar, Per Ingemar Widenborg, Goutam Kumar Dalapati, Gomathy Sandhya Subramanian and Armin Gerhard Aberle

EPJ Photovolt., 6 (2015) 65303

Published online: 27 May 2015

DOI: 10.1051/epjpv/2015004

Avishek Kumar

Per Ingemar Widenborg

Goutam Kumar Dalapati

Gomathy Sandhya Subramanian

Armin Gerhard Aberle

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