Electrical characterization of low temperature plasma epitaxial Si grown on highly doped Si substrates Cyril Leon, Sylvain Le Gall, Marie-Estelle Gueunier-Farret, Jean-Paul Kleider and Pere Roca i Cabarrocas EPJ Photovolt., 11 (2020) 4 Published online: 10 February 2020 DOI: 10.1051/epjpv/2020002