EPJ

Systematic investigation of the reactive ion beam sputter deposition process of SiO₂

Maria Mateev, Thomas Lautenschläger, Daniel Spemann, Annemarie Finzel, Jürgen W. Gerlach, Frank Frost and Carsten Bundesmann

Eur. Phys. J. B, 91 2 (2018) 45

Published online: 19 February 2018

DOI: 10.1140/epjb/e2018-80453-x

Maria Mateev

Thomas Lautenschläger

Daniel Spemann

Annemarie Finzel

Jürgen W. Gerlach

Frank Frost

Carsten Bundesmann

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