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Integrated micro-plasmas in silicon operating in helium

R. Dussart, L. J. Overzet, P. Lefaucheux, T. Dufour, M. Kulsreshath, M. A. Mandra, T. Tillocher, O. Aubry, S. Dozias, P. Ranson et al. (2 more)

Eur. Phys. J. D, 60 3 (2010) 601-608

Published online: 29 October 2010

DOI: 10.1140/epjd/e2010-00272-7

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