EPJ

Modelling of the plasma-substrate interaction and prediction of substrate temperature during the plasma heating

B. Selvan, K. Ramachandran, B. C. Pillai and D. Subhakar

Eur. Phys. J. D, 61 3 (2011) 663-675

Published online: 18 February 2011

DOI: 10.1140/epjd/e2010-10443-1

B. Selvan

K. Ramachandran

B. C. Pillai

D. Subhakar

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