EPJ

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Sven Hofmann, Koen van Gils, Steven van der Linden, Sylvain Iseni and Peter Bruggeman

Eur. Phys. J. D, 68 3 (2014) 56

Published online: 21 March 2014

DOI: 10.1140/epjd/e2014-40430-3

Sven Hofmann

Koen van Gils

Steven van der Linden

Sylvain Iseni

Peter Bruggeman

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