Plasma chemistry induced by low energy electron beams Andreas Himpsl, Thomas Dandl, Thomas Heindl, Alexander Neumeier, Jochen Wieser and Andreas Ulrich Eur. Phys. J. D, 68 6 (2014) 174 Published online: 27 June 2014 DOI: 10.1140/epjd/e2014-50126-3