EPJ

Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation

Dmitry Voloshin, Alexander Kovalev, Yuri Mankelevich, Olga Proshina, Tatyana Rakhimova and Anna Vasilieva

Eur. Phys. J. D, 69 1 (2015) 23

Published online: 21 January 2015

DOI: 10.1140/epjd/e2014-50313-2

Dmitry Voloshin

Alexander Kovalev

Yuri Mankelevich

Olga Proshina

Tatyana Rakhimova

Anna Vasilieva

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