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Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films

Ekaterina N. Voronina, Yuri A. Mankelevich, Tatyana V. Rakhimova, Alexander P. Palov, Dmitry V. Lopaev, Sergey M. Zyryanov, Alexey I. Zotovich and Mikhail R. Baklanov

Eur. Phys. J. D, 71 5 (2017) 111

Published online: 18 May 2017

DOI: 10.1140/epjd/e2017-70618-8

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