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Effect of N₂/Ar on structure and hardness of TaN-Ag thin films deposited by DC cylindrical magnetron sputtering

Farnaz Foadi, Elham Darabi and Mohammad Reza Hantehzadeh

Eur. Phys. J. Plus, 129 5 (2014) 80

Published online: 09 May 2014

DOI: 10.1140/epjp/i2014-14080-8

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