EPJ

The effect of bias voltage on microstructure and hardness of TiN films grown by ion coating deposition

P. Balashabadi, M. M. Larijani, A. -A. Shokri, E. Jafari-Khamse, H. Seyedi and S. Eshghi

Eur. Phys. J. Plus, 130 2 (2015) 29

Published online: 24 February 2015

DOI: 10.1140/epjp/i2015-15029-1

P. Balashabadi

M. M. Larijani

A. -A. Shokri

E. Jafari-Khamse

H. Seyedi

S. Eshghi

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