AlGaAs film growth using thermionic vacuum arc (TVA) and determination of its physical properties Soner Özen, Volkan Şenay, Suat Pat and Şadan Korkmaz Eur. Phys. J. Plus, 130 6 (2015) 108 Published online: 10 June 2015 DOI: 10.1140/epjp/i2015-15108-3