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Studies of the micromorphology of sputtered TiN thin films by autocorrelation techniques

Kamil Smagoń, Sebastian Stach, Ştefan Ţălu, Ali Arman, Amine Achour, Carlos Luna, Nader Ghobadi, Mohsen Mardani, Fatemeh Hafezi, Azin Ahmadpourian et al. (2 more)

Eur. Phys. J. Plus, 132 12 (2017) 520

Published online: 14 December 2017

DOI: 10.1140/epjp/i2017-11801-5

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Studies of the micromorphology of sputtered TiN thin films by autocorrelation techniques

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