EPJ

Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering

I. O. Nascimento, M. Naeem, R. S. Freitas, R. M. Nascimento, B. C. Viana, R. R. M. Sousa, M. C. Feitor, Javed Iqbal and T. H. C. Costa

Eur. Phys. J. Plus, 137 3 (2022) 319

Published online: 09 March 2022

DOI: 10.1140/epjp/s13360-022-02543-8

I. O. Nascimento

M. Naeem

R. S. Freitas

R. M. Nascimento

B. C. Viana

R. R. M. Sousa

M. C. Feitor

Javed Iqbal

T. H. C. Costa

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