Investigation over effect of different carbon content on various properties of titanium carbon nitride (TiCN) coating grown on Si (100) substrate by chemical vapor deposition (CVD) process
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Eur. Phys. J. Plus, 137 3 (2022) 363
Published online: 18 March 2022
DOI: 10.1140/epjp/s13360-022-02587-w