EPJ

Ellipsometric data analysis used in on-line metal passivation monitoring

R. Bogdanowicz and J. Ryl

Eur. Phys. J. Special Topics, 144 (2007) 215-220

Published online: 14 June 2007

DOI: 10.1140/epjst/e2007-00130-y

R. Bogdanowicz

J. Ryl

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