EPJ

Characterization of nano-depth junctions in silicon by using Photo-Carrier Radiometry (PCR)

J. A. Garcia, X. Guo, A. Mandelis, D. Shaughnessy, L. Nicolaides and A. Salnik

Eur. Phys. J. Special Topics, 153 (2008) 287-290

Published online: 12 March 2008

DOI: 10.1140/epjst/e2008-00447-y

J. A. Garcia

X. Guo

A. Mandelis

D. Shaughnessy

L. Nicolaides

A. Salnik

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