EPJ

Enhancement mode HEMT using fluorine implantation below the channel

Saleem Hamady, Frédéric Morancho, Bilal Beydoun, Patrick Austin and Mathieu Gavelle

Eur. Phys. J. Appl. Phys., 70 3 (2015) 30102

Published online: 24 June 2015

DOI: 10.1051/epjap/2015150062

Saleem Hamady

Frédéric Morancho

Bilal Beydoun

Patrick Austin

Mathieu Gavelle

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