EPJ

Study of electrical properties of Al/Si₃N₄/n-GaAs MIS capacitors deposited at low and high frequency PECVD

Wafaa Zibar, Olivier Richard, Asmaa Drighil, Touria Lachhab, Hasna Mziouek, Vincent Aimez, Abdelatif Jaouad and Rhma Adhiri

Eur. Phys. J. Appl. Phys., 97 (2022) 60

Published online: 08 September 2022

DOI: 10.1051/epjap/2022220062

Wafaa Zibar

Olivier Richard

Asmaa Drighil

Touria Lachhab

Hasna Mziouek

Vincent Aimez

Abdelatif Jaouad

Rhma Adhiri

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