EPJ

Residual stresses in AlCrN PVD thin films

T.H.T. Pham, E. Le Bourhis, P. Goudeau and P. Guérin
EPJ Web of Conferences, 6 (2010) 26002
Published online: 10 June 2010
DOI: 10.1051/epjconf/20100626002

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