Generation of Coherent sub-20 nm XUV Radiation at 78 MHz via Cavity-Based HHG I. Pupeza, S. Holzberger, T. Eidam, D. Esser, J. Weitenberg, H. Carstens, P. Rußbüldt, J. Limpert, Th. Udem, A. Tünnermann et al. (3 more) EPJ Web of Conferences, 41 (2013) 10023 Published online: 13 March 2013 DOI: 10.1051/epjconf/20134110023