EPJ

RF plasma generation in the chamber with the conducting walls

Andey Gavrikov, Sergey Kuzmichev, Gennadiy Lizyakin, Valentin Smirnov, Rinat Timirkhanov, Ravil Usmanov and Nazar Vorona

EPJ Web Conf., 157 (2017) 03062

Published online: 23 October 2017

DOI: 10.1051/epjconf/201715703062

Andey Gavrikov

Sergey Kuzmichev

Gennadiy Lizyakin

Valentin Smirnov

Rinat Timirkhanov

Ravil Usmanov

Nazar Vorona

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