EPJ

Oxidation of ablated silicon during pulsed laser deposition in a background gas with different oxygen partial pressures

Sergey V. Starinskiy, Alexey A. Rodionov, Yuri G. Shukhov and Alexander V. Bulgakov

EPJ Web Conf., 196 (2019) 00008

Published online: 14 January 2019

DOI: 10.1051/epjconf/201919600008

Sergey V. Starinskiy

Alexey A. Rodionov

Yuri G. Shukhov

Alexander V. Bulgakov

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