One-step 3D microstructuring of PMMA using MeV light ions Oleksandr Romanenko, Adela Jagerova, Andrei Borodkin, Vladimir Havranek and Anna Mackova EPJ Web Conf., 261 (2022) 02001 Published online: 11 April 2022 DOI: 10.1051/epjconf/202226102001