EPJ

Effect of electron magnetic trapping in a plasma immersion ion implantation system

K. G. Kostov, M. A. Algatti, E. J.D.M. Pillaca, M. E. Kayama, R. P. Mota and R. Y. Honda

Eur. Phys. J. D, 54 2 (2009) 205-209

Published online: 06 February 2009

DOI: 10.1140/epjd/e2009-00036-6

K. G. Kostov

M. A. Algatti

E. J.D.M. Pillaca

M. E. Kayama

R. P. Mota

R. Y. Honda

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