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PIC simulations of capacitively coupled oxygen rf discharges

Paul Matthias, Gunnar Bandelow, Konstantin Matyash, Julia Duras, Philipp Hacker, Daniel Kahnfeld, Stefan Kemnitz, Lars Lewerentz, Karl F. Lüskow et al. (2 more)

Eur. Phys. J. D, 72 5 (2018) 86

Published online: 22 May 2018

DOI: 10.1140/epjd/e2017-80565-y

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PIC simulations of capacitively coupled oxygen rf discharges

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