EPJ

On the target surface temperature during dc magnetron sputtering

Leonid R. Shaginyan, Vasily R. Shaginyan, Anatoly I. Kuzmichev and Mikhail I. Mironov

Eur. Phys. J. Appl. Phys., 92 1 (2020) 10801

Published online: 02 October 2020

DOI: 10.1051/epjap/2020200098

Leonid R. Shaginyan

Vasily R. Shaginyan

Anatoly I. Kuzmichev

Mikhail I. Mironov

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