EPJ

New DRIE-Patterned Electrets for Vibration Energy Harvesting

S. Boisseau, A.-B. Duret, J.-J. Chaillout and G. Despesse

EPJ Web of Conferences, 33 (2012) 02010

Published online: 02 October 2012

DOI: 10.1051/epjconf/20123302010

S. Boisseau

A.-B. Duret

J.-J. Chaillout

G. Despesse

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