EPJ

Front-end process modeling in silicon

L. Pelaz, L. A. Marqués, M. Aboy, P. López and I. Santos
Eur. Phys. J. B, 72 3 (2009) 323-359
Published online: 07 November 2009
DOI: 10.1140/epjb/e2009-00378-9

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