EPJ

PIC simulations of capacitively coupled oxygen rf discharges

Paul Matthias, Gunnar Bandelow, Konstantin Matyash, Julia Duras, Philipp Hacker, Daniel Kahnfeld, Stefan Kemnitz, Lars Lewerentz, Karl F. Lüskow, Jürgen Meichsner and Ralf Schneider
Eur. Phys. J. D, 72 5 (2018) 86
Published online: 22 May 2018
DOI: 10.1140/epjd/e2017-80565-y

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