EPJ

Ultrasound harmonic generation and atomic layer deposition of multilayer, deep-UV mirrors and filters with microcavity plasma arrays

Jinhong Kim, Andrey Mironov, Sehyun Park, Changgong Kim, Sung-Jin Park and J. Gary Eden

Eur. Phys. J. D, 77 5 (2023) 73

Published online: 11 May 2023

DOI: 10.1140/epjd/s10053-023-00651-3

Jinhong Kim

Andrey Mironov

Sehyun Park

Changgong Kim

Sung-Jin Park

J. Gary Eden

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