EPJ

Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer process

Graham J. Norris, Laurent Michaud, David Pahl, Michael Kerschbaum, Christopher Eichler, Jean-Claude Besse and Andreas Wallraff

EPJ Quantum Technol., 11 1 (2024) 5

Published online: 11 January 2024

DOI: 10.1140/epjqt/s40507-023-00213-x

Graham J. Norris

Laurent Michaud

David Pahl

Michael Kerschbaum

Christopher Eichler

Jean-Claude Besse

Andreas Wallraff

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