A fabrication technology for epitaxial Ni-Mn-Ga microactuators F. Khelfaoui, M. Kohl, J. Buschbeck, O. Heczko, S. Fähler and L. Schultz Eur. Phys. J. Special Topics, 158 (2008) 167-172 Published online: 01 May 2008 DOI: 10.1140/epjst/e2008-00671-5