EPJ

Transfer bonding technology for batch fabrication of SMA microactuators

T. Grund, R. Guerre, M. Despont and M. Kohl

Eur. Phys. J. Special Topics, 158 (2008) 237-242

Published online: 01 May 2008

DOI: 10.1140/epjst/e2008-00681-3

T. Grund

R. Guerre

M. Despont

M. Kohl

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