Silicon carbide thin films for EUV and soft X-ray applications

G. Monaco, M. Gastaldi, P. Nicolosi, M. G. Pelizzo, E. Gilioli, S. Rampino, F. Bissoli, F. Pattini, S. Agnoli, G. Granozzi and N. Manuzzato
Eur. Phys. J. Special Topics, 169 (2009) 159-165
Published online: 17 March 2009
DOI: 10.1140/epjst/e2009-00987-6

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