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Spatial characterization of H₂:CH₄ dissociation level in microwave ECR plasma source by fibre-optic OES

R. Bogdanowicz, Lukasz Golunski and Michal Sobaszek

Eur. Phys. J. Special Topics, 222 9 (2013) 2223-2232

Published online: 23 October 2013

DOI: 10.1140/epjst/e2013-01999-3

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