EPJ

Update of high voltage isolation control and monitoring system for HVE-400 ion implanter

Chengbo Li, Xuepeng Sun, Zhiguo Liu, Chungang Guo and Xiaoming Li

EPJ Techn Instrum, 11 1 (2024) 4

Published online: 04 April 2024

DOI: 10.1140/epjti/s40485-024-00110-2

Chengbo Li

Xuepeng Sun

Zhiguo Liu

Chungang Guo

Xiaoming Li

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