Some aspects of pulsed laser deposition of Si nanocrystalline filmsB. Polyakov, A. Petruhins, J. Butikova, A. Kuzmin and I. TaleEur. Phys. J. Appl. Phys., 48 2 (2009) 20502DOI: https://doi.org/10.1051/epjap/2009140