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Effect of hydrogen implantation in 6H-SiC before and after thermal oxidation

B. Arghavani Nia, S. Solaymani, A. Ghaderi, D. Agha Aligol and A. Baghizadeh

Eur. Phys. J. Appl. Phys., 55 1 (2011) 11301

DOI: https://doi.org/10.1051/epjap/2011100462

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