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Effects of substrates on the crystal structure, texturing and optical properties of AlN coatings deposited by inverted cylindrical magnetron sputtering

A. Khanna and D.G. Bhat

Eur. Phys. J. Appl. Phys., 59 3 (2012) 30301

DOI: https://doi.org/10.1051/epjap/2012120203

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