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Nitrogen dissociation and parametric study in a magnetic pole enhanced inductively coupled Ar-N₂ plasma (MaPE-ICP)

M. Abrar, A.W. Khan, A. Saeed, S. Naseer, A. Qayyum and M. Zakaulah

Eur. Phys. J. Appl. Phys., 62 3 (2013) 30801

DOI: https://doi.org/10.1051/epjap/2013120324

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